Catadioptric imaging systems for digital scanner

Abstract

Projection optical system for forming an image on a substrate and including an illumination relay lens and a projection lens each of which is a catadioptric system. The projection lens may include two portions in optical communication with one another, the first of which is dioptric and the second of which is catadioptric. In a specific case, the projection optical system satisfies 4 <  β I   β T  < 30 , where βI and βT are magnifications of the first portion and the overall projection lens. Optionally, the projection lens may be structured to additionally satisfy 6 <  β II   β T  < 20 , where βII is a magnification of the second portion. A digital scanner including such projection optical system and operating with UV light having a spectral bandwidth on the order of 1 picometer. Method for forming an image with such projection optical system.

Dependencies are inferred from the claim text.