Three-dimensional shape measurement apparatus and control method thereof
AssigneeCanon Kabushiki Kaisha
InventorsToshihiro Kobayashi, Shinji Uchiyama
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AssigneeCanon Kabushiki Kaisha
InventorsToshihiro Kobayashi, Shinji Uchiyama
Estimating the term…
To measure the three-dimensional shape of a target object with higher accuracy, a three-dimensional shape measurement apparatus projects a pattern image to a predetermined measurement area including a support structure on which the target object is placed; and captures an image of the predetermined measurement area. In addition, the apparatus derives, based on the captured image, a first correction value for correcting a position fluctuation of a support structure, and a second correction value for correcting a fluctuation of a projection position; and calculates, based on the captured image and the first correction value and the second correction value, a plurality of coordinates on a surface of the target object.
A three-dimensional shape measurement apparatus that measures a three-dimensional shape of a target object, comprising:
A three-dimensional shape measurement apparatus that measures a three-dimensional shape of a target object, comprising:
A three-dimensional shape measurement apparatus that measures a three-dimensional shape of a target object, comprising:
A three-dimensional shape measurement apparatus that measures a three-dimensional shape of a target object, comprising:
A method of controlling a three-dimensional shape measurement apparatus that measures a three-dimensional shape of a target object, the three-dimensional shape measurement apparatus including:
Dependencies are inferred from the claim text.