Optical measurement system with polarization compensation, and corresponding method

A Method for the adjustment of an optical measurement system, comprising:

• providing an optical measurement system, which comprises, as optical elements:
• a beam splitter;
• a first photo sensor, exposed by a first partial beam from the beam splitter;
• an optical filter;
• a second photo sensor, arranged downstream of the optical filter, exposed by a second partial beam from the beam splitter,
• wherein the angularity and relative position between multiple optical elements is arranged to be adjustable;
• providing a device for generating a difference signal from the signals of both photo sensors;
• providing a light source with periodically varying polarization;
• irradiating the light into the beam splitter, so that both photo sensors are exposed by each respective partial beam;
• generating a difference signal of the output signals of the photo sensors;
• varying the position and/or angularity of at least one optical element, and observation of the difference signal;
• determining the combination of angularity/position of the elements which achieves a minimum difference signal.

A system for polarization-compensated adjustment of an optical measurement system, comprising:

• a beam splitter;
• a first photo sensor, arranged to be exposed by a first partial beam from the beam splitter;
• an optical filter, arranged to be exposed by a second partial beam from the beam splitter;
• a second photo sensor arranged downstream of the optical filter;
• a light source for light with periodically varying polarization, wherein the polarization is periodically varied by active elements.