Inspection apparatus and inspection method

Abstract

An inspection apparatus and an inspection method capable of reducing the effect of noises are provided. An inspection apparatus according to the present invention includes a work table 26 on which an inspection panel 12 is placed, a probe unit 31 including a probe 38 that comes into contact with an electrode 12a of the inspection panel 12 placed on the work table 26, and a stage 11 that moves the work table 26 in order to bring the probe 38 into contact with the electrode 12a of the inspection panel 12 placed on the work table 26, in which the stage 11 is connected to the ground and supports the work table 26 through a resistive element.

Dependencies are inferred from the claim text.