Back to results
US 2015/0145374 A1Published application
Transducer and method for forming the same
AssigneeAgency for Science, Technology and Research
InventorsJinghui XU, Hongbin YU, Liang LOU, Alex Yuandong GU
Life of this patent
Estimating the term…
Abstract
A transducer is provided, which includes a substrate, wherein a cavity is defined at least partially through the substrate, at least one stopper structure arranged within the cavity, a support layer arranged over the at least one stopper structure and the cavity to seal the cavity, and a piezoelectric functional arrangement arranged on the support layer. According to further embodiments of the present invention, a method for forming a transducer is also provided.
Claims20
A transducer comprising:
- a substrate, wherein a cavity is defined at least partially through the substrate;
- at least one stopper structure arranged within the cavity;
- a support layer arranged over the at least one stopper structure and the cavity to seal the cavity;
- and
- a piezoelectric functional arrangement arranged on the support layer.
2 more elements
A method for forming a transducer, the method comprising:
- forming a cavity at least partially through a substrate;
- forming at least one stopper structure within the cavity;
- forming a support layer over the at least one stopper structure and the cavity to seal the cavity;
- and
- forming a piezoelectric functional arrangement on the support layer.
2 more elements
Dependencies are inferred from the claim text.