Diffraction Grating with Multiple Periodic Widths
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorHsin-Chieh Chang
Life of this patent
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Abstract
An integrated circuit includes a substrate, a plurality of photo detectors formed in the substrate, and a diffraction grating having multiple sections disposed over the plurality of photo detectors. Each section of the diffraction grating has a respective periodic width for a respective target wavelength. The diffraction grating has at least two different target wavelengths. The diffraction grating is interlaced with filters. The filters in each section of the diffraction grating are configured to pass a respective electromagnetic wave with the respective target wavelength.
Claims20
An integrated circuit, comprising:
- a substrate;
- a plurality of photo detectors formed in the substrate;
- and
- a diffraction grating having multiple sections disposed over the plurality of photo detectors,
- wherein each section of the diffraction grating has a respective periodic width for a respective target wavelength, the diffraction grating has at least two different target wavelengths, the diffraction grating is interlaced with filters, and the filters in each section of the diffraction grating are configured to pass a respective electromagnetic wave with the respective target wavelength.
A method, comprising:
- forming a plurality of photo detectors in a substrate;
- and
- forming a diffraction grating with multiple sections over the photo detectors, wherein each section of the diffraction grating has a respective periodic width for a respective target wavelength, the diffraction grating has at least two different target wavelengths, the diffraction grating is interlaced with filters, and the filters in each section of the diffraction grating are configured to pass a respective electromagnetic wave with the respective target wavelength.
An integrated circuit, comprising:
- a substrate;
- a plurality of divisions of the substrate, wherein each division includes:
- a plurality of photo detectors formed in the substrate;
- and
- a diffraction grating having multiple sections disposed over the plurality of photo detectors,
- wherein each section of the diffraction grating has a respective periodic width for a respective target wavelength, the diffraction grating has at least two different target wavelengths, the diffraction grating is interlaced with filters, the filters in each section of the diffraction grating are configured to pass a respective electromagnetic wave with the respective target wavelength, and the respective plurality of photo detectors in each division are aligned with the respective diffraction grating with a different phase from another division.
Dependencies are inferred from the claim text.