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US 2015/0144997 A1Published application
Tunable FIN-SCR for Robust ESD Protection
AssigneeIntel Mobile Communications GmbH
InventorsMayank Shrivastava, Christian Russ, Harald Gossner
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Abstract
One embodiment of the present invention relates to a silicon-controlled-rectifier (SCR). The SCR includes a longitudinal silicon fin extending between an anode and a cathode and including a junction region there between. One or more first transverse fins traverses the longitudinal fin at one or more respective tapping points positioned between the anode and the junction region. Other devices and methods are also disclosed.
Claims28
A silicon-controlled-rectifier (SCR) disposed on a substrate, comprising:
- a longitudinal silicon fin extending between an anode and a cathode and including a junction region there between;
- and
- one or more first transverse fins that traverse the longitudinal fin at one or more respective tapping points positioned between the anode and the junction region.
A semiconductor device, comprising:
- a longitudinal fin comprised of silicon and including:
- a first distal region having a first conductivity type;
- a first inner region contacting the first distal region at a first junction and having a second conductivity type;
- a second inner region contacting the first inner region at a second junction and having the first conductivity type;
- and
- a second distal region contacting the second inner region at a third junction and having the second conductivity type;
- and
- a first transverse fin that traverses the longitudinal fin at the first inner region.
5 more elements
A method comprising:
- providing a silicon controlled rectifier (SCR) device comprising:
- a longitudinal fin to electrically couple an SCR anode and SCR cathode, and one or more transverse fins that traverse the longitudinal fin;
- applying a voltage bias to the one or more transverse fins;
- and
- selectively enabling and disabling current flow between the SCR anode and the SCR cathode based on whether a predetermined relationship exists between the voltage bias and a predetermined threshold voltage of the SCR device.
2 more elements
Dependencies are inferred from the claim text.