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US 2015/0144883 A1Published application
Forming recessed structure with liquid-deposited solution
AssigneeAtmel Corporation
InventorBryan D. Sendelweck
Life of this patent
Estimating the term…
Abstract
A damascene approach is used to form a recessed structure in a substrate for receiving liquid-deposited solution, such as a carbon nanotube (CNT) solution. The liquid-deposited solution is built-up in the recessed structure, simplifying the coating process and providing a more uniform thickness of the liquid-deposited layer.
Claims15
A method of fabricating an article of manufacture, comprising:
- forming a recessed structure in a substrate;
- depositing liquid solution on the substrate, filling the recessed structure;
- and
- baking the substrate to form a recessed plug in the recessed structure.
1 more element
An article of manufacture, comprising:
- a dielectric substrate;
- a recessed structure in the dielectric substrate;
- and
- a plug of liquid-deposited solution in the recessed structure.
1 more element
An article of manufacture made by the following process:
- forming a recessed structure in a substrate;
- depositing liquid solution on the substrate, filling the recessed structure;
- and
- baking the substrate to form a recessed plug in the recessed structure.
1 more element
Dependencies are inferred from the claim text.