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US 2015/0144809 A1Published application
Target supply device and extreme ultraviolet light generation apparatus
AssigneeGigaphoton Inc.
InventorsShinji OKAZAKI, Takanobu ISHIHARA, Yutaka SHIRAISHI
Life of this patent
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Abstract
A target supply device may include: a tank including a storage portion that stores a target material and a supply portion that is in communication with the storage portion, the target material flowing into the supply portion; a nozzle including a nozzle hole that is in communication with the supply portion to be fed with the target material; and a coating portion that covers a wall surface of the nozzle hole.
Claims7
A target supply device comprising:
- a tank including a storage portion that is configured to store a target material and a supply portion that is in communication with the storage portion so that the target material flows into the supply portion;
- a nozzle including a nozzle hole that is in communication with the supply portion and is configured to be fed with the target material;
- and
- a coating portion that covers a wall surface of the nozzle hole.
1 more element
An extreme ultraviolet light generation apparatus comprising:
- a chamber into which a laser light is introduced;
- and
- a target supply device that is configured to output a target material into the chamber, the target supply device comprising:
- a tank including a storage portion that is configured to store a target material and a supply portion that is in communication with the storage portion so that the target material flows into the supply portion;
- a nozzle including a nozzle hole that is in communication with the supply portion and is configured to be fed with the target material;
- and
- a coating portion that covers a wall surface of the nozzle hole.
4 more elements
Dependencies are inferred from the claim text.