Particle beam system and method for operating the same

A method of operating a particle beam system, the method comprising:

• digitally controlling first and second digitally controlled modules of the particle beam system;
• and
• sending digital command data to the first and second digitally controlled modules,
• wherein:
• the digital command data comprise at least a first command for the first digitally controlled module and at least a second command for the second digitally controlled module;
• and
• the digital command data is generated based on information representing:
• a) a time when the first command is to be executed by the first digitally controlled module;
• and b) a time when the second command is to be executed by the second digitally controlled module.

A particle beam system comprising:

• a first digitally controlled module;
• a second digitally controlled module;
• and
• an encoding module configured generate digital command data,
• wherein:
• the digital command data comprises at least a first command for the first digitally controlled module and at least a second command for the second digitally controlled module;
• and
• the digital command data is generated based on information representing:
• a) a time when the first command is to be executed by the first digitally controlled module;
• and b) a time when the second command is to be executed by the second digitally controlled module.