Inspection apparatus and inspection method

An inspection apparatus comprising:

• a light source that illuminates a sample on which a pattern is formed;
• a detector that detects light reflected from the sample illuminated by the light source to take a sample image in which a position on a surface of the sample is associated with a brightness value for each pixel;
• and
• a processing device that performs an inspection based on a correlation between the brightness value of the sample image obtained by the detector and a size in a surface shape or a size in a height direction of the pattern of the sample, wherein
• the detector obtains a plurality of sample images by shooting the sample under a plurality of shooting conditions, and
• the processing device calculates a summation value obtained by adding up brightness values of a plurality of sample images with weights for each pixel or each area including a plurality of pixels, and performs an inspection based on the calculated summation value for each pixel or each area.