High bandwidth linear flexure bearing

Abstract

A system and a method are disclosed for a high bandwidth linear flexure bearing, which may be particularly useful in high end accelerometers and high-precision linear servo mechanisms. Certain embodiments may apply to sensors that measure motion in one dimension. Such embodiments may substantially improve the off-axis performance of the sensors providing ultra-repeatability while maintaining linearity of motion and linearity in spring rate Some embodiments use spring flexures and flex-couplers to support the sensor stage and connect it to the reference base. Several embodiments are disclosed that may fit the needs of specific applications in the area of high-end servos and accelerometers.

Dependencies are inferred from the claim text.