Apparatus and method for polishing and strengthening substrate
AssigneeSamsung Display Co., Ltd.
InventorsJoo Woan Cho, Seungho Kim
Life of this patent
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AssigneeSamsung Display Co., Ltd.
InventorsJoo Woan Cho, Seungho Kim
Estimating the term…
An apparatus and method for polishing and strengthening a substrate are disclosed. In one aspect, the apparatus includes a table on which a substrate is placed, a powder supply portion for polishing a surface of the substrate, a substance supply portion, and an injector. The powder supply portion is placed over the table. The substance supply portion is configured to supply a substance onto the polished surface of the substrate. The injector is configured to inject the powder from the powder supply portion onto the surface of the substrate and the substance from the substance supply portion onto the polished surface of the substrate.
An apparatus for polishing and strengthening a substrate, comprising:
A method of polishing and strengthening a substrate, comprising:
An apparatus for polishing and strengthening a substrate, comprising:
Dependencies are inferred from the claim text.