Substrate heating pedestal having ceramic balls
AssigneeApplied Materials, Inc.
InventorsMartin RIKER, Wei W. WANG
Life of this patent
Estimating the term…
Abstract
A substrate heating pedestal for a process chamber for processing substrates is described. The pedestal comprises an annular plate comprising a surface having an array of recesses. A plurality of ceramic balls are each positioned in a recess on the surface of the annular plate to define a substrate receiving surface. A heating element is embedded in the annular plate.
Claims20
A substrate heating pedestal for a process chamber for processing substrates, the substrate heating pedestal comprising:
- (a) an annular plate comprising a surface having an array of recesses;
- (b) a plurality of ceramic balls, each ceramic ball being positioned in a recess on the surface of the annular plate to define a substrate receiving surface;
- and
- (c) a heating element embedded in the annular plate.
A substrate heating pedestal for a process chamber for processing substrates, the substrate heating pedestal comprising:
- (a) an annular plate comprising a first disk having a surface with an array of recesses, and a second disk having a channel to receive a heating element;
- (b) a plurality of ceramic balls, each ceramic ball being positioned in a recess on the surface of the annular plate to define a substrate receiving surface;
- and
- (c) a heating element embedded in the channel of the second disk of the annular plate.
A substrate heating pedestal for a process chamber for processing substrates, the substrate heating pedestal comprising:
- (a) an annular plate comprising a first disk having a surface with an array of recesses, and a second disk having a channel to receive a heating element;
- (b) a plurality of quartz balls, each quartz ball being positioned in a recess on the surface of the annular plate to define a substrate receiving surface;
- and
- (c) a heating element embedded in the channel of the second disk of the annular plate.
Dependencies are inferred from the claim text.