High speed differential wiring in glass ceramic mcms
AssigneeInternational Business Machines Corporation
InventorsJinwoo Choi, Daniel M. Dreps, Rohan U. Mandrekar
Life of this patent
Estimating the term…
Abstract
The embodiments of the present invention relate generally to the fabrication of integrated circuits, and more particularly to a structure and method for fabricating differential wiring patterns in multilayer glass-ceramic (MLC) modules. A structure and method of forming a MLC having layers with staggered, or offset, pairs of lines formed directly on one another are disclosed. In addition, a structure and method of forming a MLC having layers with staggered, or offset, pairs of lines that periodically reverse polarity are disclosed.
Claims13
A method comprising:
- forming a glass-ceramic carrier having multiple layers formed directly on top of one another, wherein a first layer contains a first left line and a first right line, a second layer contains a second left line and a second right line which are vertically offset from the first left line and the first right line, and a third layer contains a third left line and a third right line which are vertically aligned with the first pair of lines.
A method comprising:
- forming a first pair lines on a first greensheet, the first pair of lines comprising a first layer left line and a first layer right line separated by an intervening portion of the first greensheet;
- positioning a second greensheet on the first greensheet;
- forming a second pair of lines on the second greensheet, the second pair of lines comprising a second layer left line and a second layer right line separated by an intervening portion of the second greensheet, wherein the second layer left line is vertically aligned with the first layer right line;
- positioning a third greensheet on the second greensheet;
- forming a third pair of lines on the third greensheet, the third pair of lines comprising a third layer left line and a third layer right line separated by an intervening portion of the third greensheet, wherein the third layer left line is vertically aligned with the first layer left line and the third layer right line is vertically aligned with the second layer left line;
- and
- performing a sintering process to harden and join the first greensheet, the second greensheet, and the third greensheet together to form a solid glass-ceramic multilayer carrier.
Dependencies are inferred from the claim text.