Piezoelectric actuator module and mems sensor having the same

A piezoelectric actuator module, comprising:

• a multilayer part comprising a piezoelectric material and a multilayer electrode part connected to the piezoelectric material;
• a support layer coupled with the multilayer part;
• and
• a support part displaceably supporting the support layer, wherein the multilayer part is configured to expand or contract when voltages in anti-phase are applied to the multilayer electrode part.

A piezoelectric actuator module, comprising:

• a multilayer part comprising a multilayer piezoelectric material part and an electrode part connected to the multilayer piezoelectric material part;
• a support layer coupled with the multilayer part;
• and
• a support part displaceably supporting the support layer,
• wherein the multilayer piezoelectric material part is poled in the opposite directions, and the multilayer part is configured to expand or contract when voltages in anti-phase are applied to connected electrodes of the electrode part and to a non-connected electrode of the electrode part.

An MEMS sensor, comprising:

• a flexible substrate comprising excitation means and sensing means;
• a mass body coupled with the flexible substrate;
• and
• a post supporting the flexible substrate,
• wherein the excitation means comprises a multilayer piezoelectric material part, the multilayer piezoelectric material part comprising a multilayer piezoelectric material part and an electrode part connected to the multilayer piezoelectric material part, the multilayer piezoelectric material part is poled in the same direction, and the multilayer part is configured to expand or contract when voltages in anti-phase are applied to the electrode part.