Micromechanical z-sensor
AssigneeRobert Bosch GmbH
InventorGuenther-Nino-Carlo ULLRICH
Life of this patent
Estimating the term…
Abstract
A micromechanical Z-sensor, including a rocker having trough structures which is twistably supported with the aid of a spring device, the rocker having a mass distribution which is asymmetric with respect to the spring device, first electrodes situated above the trough structure, and second electrodes situated below the rocker, and a catch device including at least one spring element against which a stop element which is anchored to a substrate is able to strike, at least two catch devices which are spatially separated from each other being provided per rocker arm of the rocker.
Claims10
A micromechanical Z-sensor, comprising:
- a rocker having trough structures which is twistably supported with the aid of a spring device, the rocker having a mass distribution which is asymmetric with respect to the spring device;
- first electrodes situated above the trough structure;
- second electrodes situated below the rocker;
- and
- a catch device including at least one spring element against which a stop element which is anchored to a substrate is able to strike, at least two catch devices which are spatially separated from each other being provided per rocker arm of the rocker.
A method for manufacturing a micromechanical Z-sensor, th method comprising:
- providing an asymmetrically formed rocker made up of at least two functional layers;
- forming at least two catch devices which are spatially separated from each other per rocker arm, a formation of spring elements being carried out in the lowest functional layer of the rocker;
- and
- forming stop elements so that the stop elements are anchored to the substrate, a stop area of the stop elements protruding onto a stop surface of the spring elements.
Dependencies are inferred from the claim text.