Resonator
AssigneeMurata Manufacturing Co., Ltd.
InventorHeikki KUISMA
Life of this patent
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Abstract
A micro-electro-mechanical device with a closed feed-back damping loop is provided. Displacement in the mechanical resonator is opposed with a damping force determined by the closed feed-back loop that comprises a filter with a peaked frequency response, and associated phase adjustment. An oscillation-free configuration that allows high signal amplification is achieved.
Claims18
A micro-electro-mechanical device, comprising:
- a resonator;
- a feed-back loop;
- wherein
- the feed-back loop is adjusted to damp the resonator with an electrical force feed-back mechanism;
- and
- damping by the feed-back loop is controlled by a filter with a peaked frequency response that peaks at a defined resonant frequency.
A micro-electro-mechanical device according to 2, wherein a mechanical resonant frequency of the resonator is within the bass band of the peaked frequency response.
A method for operating a micro-electro-mechanical device,
- comprising a resonator and a feed-back loop;
- wherein the method comprises damping the resonator with an electrical force feed-back mechanism of the feed-back loop;
- and
- controlling damping by the feed-back loop by a filter with a peaked frequency response that peaks at a defined resonant frequency.
Dependencies are inferred from the claim text.