Process for large-scale ammonothermal manufacturing of gallium nitride boules
AssigneeSoraa, Inc.
InventorsMARK P. D'EVELYN, DIRK EHRENTRAUT, DERRICK S. KAMBER, BRADLEY C. DOWNEY
Life of this patent
Estimating the term…
Loading patent…
AssigneeSoraa, Inc.
InventorsMARK P. D'EVELYN, DIRK EHRENTRAUT, DERRICK S. KAMBER, BRADLEY C. DOWNEY
Estimating the term…
Large-scale manufacturing of gallium nitride boules using m-plane or wedge-shaped seed crystals can be accomplished using ammonothermal growth methods. Large-area single crystal seed plates are suspended in a rack, placed in a large diameter autoclave or internally-heated high pressure apparatus along with ammonia and a mineralizer, and crystals are grown ammonothermally. The orientation of the m-plane or wedge-shaped seed crystals are chosen to provide efficient utilization of the seed plates and of the volume inside the autoclave or high pressure apparatus.
A method for growth of an m-plane gallium-containing nitride crystal, the method comprising:
A method for growth of an m-plane gallium-containing nitride crystal, the method comprising:
A method for growth of a plurality of gallium-containing nitride crystals, the method comprising:
Dependencies are inferred from the claim text.