Piezoelectric microcantilever sensors for biosensing

A method for using a piezoelectric microcantilever sensor comprising the steps of:

• actuating a microcantilever sensor having a Q value greater than 20, comprising a piezoelectric layer, a non-piezoelectric layer, and a receptor, wherein said piezoelectric layer has a thickness of about 1 μm to about 127 μm, a dielectric constant of at least 1600, and a piezoelectric coefficient −d31 of at least about 250 pm/V;
• binding a molecule or compound to said receptor,
• detecting a force exerted on said piezoelectric layer by said bound molecule or compound, and
• determining one or more of a presence of said molecule or compound and a concentration of said molecule or compound from said detected force.