Method for manufacturing inverted metamorphic multijunction solar cells
AssigneeEmcore Solar Power, Inc.
InventorDaniel Derkacs
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Abstract
A method of fabricating both a multijunction solar cell and an inverted metamorphic multijunction solar cell in a single process using a MOCVD reactor by forming a first multijunction solar cell on a semiconductor substrate; forming a release layer over the first solar cell; forming an inverted metamorphic second solar cell over the release layer; and etching the release layer so as to separate the multijunction first solar cell and the inverted metamorphic second solar cell.
Claims20
A method of fabricating both a multijunction solar cell and an inverted metamorphic multijunction solar cell in a single process using a MOCVD reactor comprising:
- providing a semiconductor substrate;
- forming a first multijunction solar cell on said semiconductor substrate;
- forming a release layer over the first solar cell;
- forming an inverted metamorphic second solar cell including:
- (i) growing a first solar subcell having a first band gap on said release layer;
- (ii) growing a second solar subcell over said first subcell having a second band gap smaller than said first band gap;
- growing a first grading interlayer over said second solar subcell;
- (iii) growing a third solar subcell over said grading interlayer having a fourth band gap smaller than said second band gap such that said third solar subcell is lattice mismatched with respect to said second solar subcell;
- and
- etching the release layer so as to separate the multijunction first solar cell and the inverted metamorphic second solar cell.
Dependencies are inferred from the claim text.