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US 2015/0103396 A1Published application
Antireflective Structures for Optics
OwnerByron Zollars, Steve Savoy +1inventors
InventorsByron Zollars, Steve Savoy, Qizhen Xue
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Abstract
The disclosure relates to methods for the fabrication of randomly arranged, antireflective structures on surfaces of optical substrates and to optics having antireflective coatings comprising random surface structures.
Claims17
An optic having an antireflective surface comprising:
- a substrate, a buffer layer deposited on at least one side of the substrate, and a plurality of surface structures formed by reactive ion etching of the buffer-coated substrate, wherein the plurality of structures are configured to reduce reflection of electromagnetic radiation having an incident angle from 0° to 70° over a region of at least 2.0 octaves within the electromagnetic spectrum region of 350 nm to 18,000 nm.
A method of forming a plurality of random surface structures on an optical substrate, comprising:
- (a) providing a substrate;
- (b) depositing a buffer layer on a surface of the substrate;
- (c) depositing a metal film on the buffer layer;
- (d) heating to effect annealing of the metal into randomly arranged nanoparticles;
- (e) dry etching the buffer-coated substrate;
- and
- (f) performing a wet etch to remove metal nanoparticles.
4 more elements
A method of forming a plurality of random surface structures on an optical substrate, comprising:
- (a) providing a substrate comprising ZnSe;
- (b) depositing a buffer layer comprising AlN on a surface of the substrate;
- (c) depositing a metal film comprising Ni on the buffer layer;
- (d) heating to effect annealing of the Ni into randomly arranged nanoparticles;
- (e) dry etching the buffer-coated substrate;
- and
- (f) wet etching to remove metal nanoparticles.
4 more elements
Dependencies are inferred from the claim text.