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US 2015/0102467 A1Published application
Method of diced wafer transportation
OwnerWei-Sheng Lei, Brad Eaton +5inventors
InventorsWei-Sheng Lei, Brad Eaton, Aparna Iyer, Saravjeet Singh, Todd Egan, Ajay Kumar, Seshadri Ramaswami
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Abstract
Methods of dicing semiconductor wafers, and transporting singulated die, are described. In an example, a method of dicing a wafer having a plurality of integrated circuits thereon involves dicing the wafer into a plurality of singulated dies disposed above a dicing tape. The method also involves forming a water soluble material layer over and between the plurality of singulated dies, above the dicing tape.
Claims5
An apparatus, comprising:
- a plurality of singulated dies disposed above a dicing tape;
- a water soluble material layer disposed over and between the plurality of singulated die, above the dicing tape.
Dependencies are inferred from the claim text.