Blanking device for multiple charged particle beams

A multi charged particle beam writing apparatus comprising:

• a stage configured to mount a target object thereon and to be continuously movable;
• an emission unit configured to emit a charged particle beam;
• an aperture member, in which a plurality of first openings are formed, configured to form multiple beams by letting a region including a whole of the plurality of first openings be irradiated with the charged particle beam and letting portions of the charged particle beam respectively pass through a corresponding opening of the plurality of first openings;
• a substrate, in which a plurality of second openings are formed, the plurality of second openings being arranged in two dimensions and through which multiple beams pass;
• a plurality of shift registers, which are formed close to a corresponding opening in the plurality of openings on the substrate, configured to be arranged in two dimensions and to form a plurality of groups each including shift registers connected in series of the plurality of shift registers;
• a plurality of blankers, each of which includes a pair of electrodes arranged on the substrate to be at opposite sides of a corresponding opening in the plurality of second openings, configured to respectively provide a blanking deflection to a corresponding beam of multiple beams having passed through the plurality of openings of the aperture member, by generating a deflection electric field which is generated by respectively controlling at least one of the pair of electrodes through a shift register for a corresponding beam in the plurality of shift registers;
• a plurality of serial parallel conversion units configured to be arranged along four sides of a quadrangular region surrounding a whole of the plurality of shift registers and to be respectively connected by parallel wiring to at least one of the plurality of groups;
• and
• a plurality of pads configured to be arranged along the four sides of the quadrangular region, and to be respectively in combination with a corresponding serial parallel conversion unit of the plurality of serial parallel conversion units such that each of the plurality of pads is connected by single wiring to the corresponding serial parallel conversion unit.

A blanking device for multiple charged particle beams comprising:

• a substrate, in which a plurality of openings are formed, the plurality of openings being arranged in two dimensions and through which multiple beams pass;
• a plurality of shift registers, which are formed close to a corresponding opening in the plurality of openings on the substrate, configured to be arranged in two dimensions and to form a plurality of groups each including shift registers connected in series of the plurality of shift registers;
• a plurality of deflection means, each of which includes a pair of electrodes arranged on the substrate to be at opposite sides of a corresponding opening in the plurality of openings, for respectively providing a blanking deflection to a corresponding beam of the multiple beams by generating a deflection electric field which is generated by respectively controlling at least one of the pair of electrodes through a shift register for a corresponding beam in the plurality of shift registers;
• a plurality of serial parallel conversion means for being arranged along four sides of a quadrangular region surrounding a whole of the plurality of shift registers and being respectively connected by parallel wiring to at least one of the plurality of groups;
• and
• a plurality of pads configured to be arranged along the four sides of the quadrangular region, and to be respectively in combination with a corresponding serial parallel conversion unit of the plurality of serial parallel conversion units such that each of the plurality of pads is connected by single wiring to the corresponding serial parallel conversion unit.