Method of producing an aperture plate for a nebulizer
AssigneeStamford Devices Limited
InventorBrendan Hogan
Life of this patent
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Abstract
A photo-resist (21) is applied in a pattern of vertical columns having the dimensions of holes or pores of the aperture plate to be produced. This mask pattern provides the apertures which define the aerosol particle size, having up to 2500 holes per square mm. There is electro-deposition of metal (22) into the spaces around the columns (21). There is further application of a second photo-resist mask (25) of much larger (wider and taller) columns, encompassing the area of a number of first columns (21). The hole diameter in the second plating layer is chosen according to a desired flow rate.
Claims32
A method of manufacturing an aerosol-forming aperture plate wafer, the method comprising:
- providing a mandrel of conductive material,
- applying a mask over the mandrel in a pattern of columns,
- electroplating the spaces around the columns,
- removing the mask to provide a wafer of the electroplated material with aerosol-forming holes where the mask columns were,
- wherein said masking and plating steps are followed by at least one subsequent cycle of masking and plating to increase the wafer thickness,
- wherein the at least one subsequent cycle brings the overall wafer thickness up to a level desired according to criteria for removal of the wafer from the mandrel, and/or desired frequency of operation of the aperture plate, and/or physical constraints of an aerosolizing drive,
- wherein the at least one subsequent cycle provides after mask removal:
- spaces at least some of which overlie a plurality of aerosol-forming apertures, and
- a plating material which occludes some of the aerosol-forming apertures, and
- wherein the at least one subsequent cycle is performed according to desired flow rate through the aperture plate.
An aperture plate wafer comprising a bottom layer of photolithography-plated metal with aerosol-forming through holes and at least one top layer of photolithography-plated metal having spaces, in which said spaces overlie a plurality of aerosol-forming through holes, in which the size and number of aerosol-forming holes per large hole is related to a desired aerosol flow rate.
Dependencies are inferred from the claim text.