Actuator drive system, optical module, and electronic apparatus
AssigneeSeiko Epson Corporation
InventorsNozomu HIROKUBO, Akira SANO
Life of this patent
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Abstract
An actuator drive system includes electrostatic actuators and a voltage controller that applies drive voltages to the electrostatic actuators, and the voltage controller includes a digital control device that splits an 8-bit drive variable corresponding to an overall displacement amount provided by the electrostatic actuators into 4-bit individual drive variables, a first DAC that produces a first drive voltage signal based on a first individual drive variable, and a second DAC that produces a second drive voltage signal based on a second individual drive variable.
Claims14
An actuator drive system comprising:
- a plurality of actuators that are driven to provide displacement amounts according to drive voltages;
- and
- a voltage controller that applies the drive voltages to the plurality of actuators,
- wherein the voltage controller includes
- a variable splitter that splits a drive variable having a plurality of digits corresponding to an overall displacement amount provided by the plurality of actuators into individual drive variables having at least one digit and corresponding to the plurality of actuators, and
- signal generators with which the plurality of actuators are provided and which generate drive voltage signals corresponding to the drive voltages based on the individual drive variables.
An optical module comprising:
- a pair of reflection films facing each other;
- a plurality of actuators that are driven to provide displacement amounts according to drive voltages to change the dimension of a gap between the pair of reflection films;
- and
- a voltage controller that applies the drive voltages to the plurality of actuators,
- wherein the voltage controller includes
- a variable splitter that splits a drive variable having a plurality of digits corresponding to an overall displacement amount provided by the plurality of actuators into individual drive variables having at least one digit and corresponding to the plurality of actuators, and
- signal generators with which the plurality of actuators are provided and which generate drive voltage signals corresponding to the drive voltages based on the individual drive variables.
An optical module comprising:
- reflection films facing each other with a gap therebetween;
- a first actuator that is driven stepwise to provide a first displacement amount to change the dimension of the gap;
- and
- a second actuator that is driven stepwise to provide a second displacement amount greater than the first displacement amount to change the dimension of the gap,
- wherein when the displacement amount provided by the first actuator returns from a maximum value to an initial value, the second actuator is driven.
Dependencies are inferred from the claim text.