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US 2015/0092272 A1Published application
Interference filter, optical filter device, optical module, and electronic apparatus
AssigneeSeiko Epson Corporation
InventorsSusumu SHINTO, Akira SANO
Life of this patent
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Abstract
A variable wavelength interference filter includes a stationary substrate, a stationary reflecting film disposed on the entire surface of the stationary substrate opposed to a movable substrate, and formed of a multilayer film, a movable reflecting film opposed to the stationary reflecting film, and a first mirror electrode disposed on the stationary reflecting film.
Claims16
An interference filter comprising:
- a substrate;
- a first reflecting film disposed on one surface of the substrate, the first reflecting film being formed of a plurality of layers;
- a second reflecting film opposed to the substrate;
- and
- an electrode disposed on the first reflecting film,
- wherein the first reflecting film includes a first region facing the second reflecting film, and a second region in an area extending from the first region to an outer circumferential edge of the substrate.
3 more elements
An optical filter device comprising:
- an interference filter including:
- a substrate,
- a first reflecting film disposed on one surface of the substrate, the first reflecting film being formed of a plurality of layers,
- a second reflecting film opposed to the substrate, and
- an electrode disposed on the first reflecting film,
- wherein the first reflecting film includes a first region facing the second reflecting film, and a second region in an area extending from the first region to an outer circumferential edge of the substrate;
- and
- a housing holding the interference filter.
5 more elements
An interference filter comprising:
- a stationary substrate;
- a movable substrate opposed to the stationary substrate;
- a stationary reflecting film disposed on an entire surface of the stationary substrate facing the movable substrate, the stationary reflecting film being a multilayer film;
- a movable reflecting film disposed on the movable substrate and facing the stationary reflecting film;
- and
- a mirror electrode disposed on part of the stationary reflecting film.
3 more elements
Dependencies are inferred from the claim text.