Back to results
US 2015/0091231 A1Published application
Stage device and semiconductor fabrication apparatus including the same
AssigneeSamsung Electronics Co., Ltd.
InventorsSANG-WOOK PARK, OUI-SERG KIM, SANG-DON JANG
Life of this patent
Estimating the term…
Abstract
A stage device includes an interference mirror extending in an X-axis direction and first through third flexure structures configured to restrict the interference mirror. The first flexure structure restricts the interference mirror in a Y-axis direction and a Z-axis direction. The second flexure structure restricts the interference mirror in the Y-axis direction and the Z-axis direction. The third flexure structure restricts the interference mirror in the X-axis direction and the Z-axis direction.
Claims20
A stage device, comprising:
- an interference mirror extending in an X-axis direction;
- a datum flexure structure configured to restrict the interference mirror in a Y-axis direction and a Z-axis direction, the datum flexure structure including a datum upper plate combined with the interference mirror and a datum hinge part disposed under the datum upper plate;
- a distant flexure structure configured to restrict the interference mirror in the Y-axis direction and the Z-axis direction, the distant flexure structure including a distant upper plate spaced apart from the datum upper plate in the X-axis direction and a first distant hinge part disposed under the distant upper plate;
- and
- an intermediate flexure structure configured to restrict the interference mirror in the X-axis direction and the Z-axis direction, the intermediate flexure structure including an intermediate upper plate disposed between the datum upper plate and the distant upper plate and a first intermediate hinge part disposed under the intermediate upper plate,
- wherein each of the datum hinge part, the first distant hinge part, and the first intermediate hinge part comprises flexure hinges stacked in the Z-axis direction, and
- wherein the intermediate upper plate is spaced apart from the datum upper plate and the distant upper plate in the Y-axis direction.
4 more elements
A stage device, comprising:
- a first flexure structure including a first upper plate and first flexure hinges configured to restrict the first upper plate in a Y-axis direction and a Z-axis direction;
- a second flexure structure spaced apart from the first flexure structure in an X-axis direction, the second flexure structure including a second upper plate and second flexure hinges configured to restrict the second upper plate in the Y-axis direction and the Z-axis direction;
- a third flexure structure disposed between the first flexure structure and the second flexure structure, the third flexure structure including a third upper plate and third flexure hinges configured to restrict the third upper plate in the X-axis direction and the Z-axis direction;
- and
- an interference mirror disposed on the first through third upper plates, the interference mirror extending in the X-axis direction,
- wherein the first and second upper plates are disposed close to a first side surface of the interference minor, the first side surface of the interference mirror extending in the X-axis direction, wherein the third upper plate is disposed close to a second side surface of the interference mirror opposite to the first side surface, and wherein a Y-axial horizontal length of each of the first through third upper plates is less than or equal to the half of a Y-axial horizontal length of the interference mirror.
3 more elements
A stage device, comprising:
- a stage;
- a first support disposed on the stage;
- a first interference mirror disposed on the first support;
- a first flexure structure disposed adjacent to a first upper edge of the first support between the first support and the first interference mirror, the first flexure structure restricting a movement of the first interference mirror in a Y-axis direction and a Z-axis direction;
- a second flexure structure disposed adjacent to the first upper edge of the first support between the first support and the first interference mirror, the second flexure structure restricting a movement of the first interference mirror in the Y-axis direction and the Z-axis direction;
- and
- a third flexure structure disposed adjacent to a second upper edge of the first support between the first support and the first interference mirror, the second upper edge opposite the first upper edge, the third flexure structure restricting a movement of the first interference mirror in an X-axis direction and the Z-axis direction, the third flexure structure positioned between the first flexure structure and the second flexure structure in the X-axis direction,
- wherein each of the first flexure structure, the second flexure structure, and the third flexure structure includes a plurality of hinges that are stacked in the Z-axis direction.
5 more elements
Dependencies are inferred from the claim text.