Imprint apparatus, and method of manufacturing article
AssigneeCanon Kabushiki Kaisha
InventorYosuke Murakami
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Abstract
The present invention provides an imprint apparatus for molding an imprint material on a target region on a substrate using a mold to form a pattern on the target region, the apparatus comprising a heater configured to deform the target region by heating the substrate, a measurement device configured to measure an overlay state between the target region and the mold, and a controller configured to control the heater such that the overlay state falls within a tolerance.
Claims10
An imprint apparatus for molding an imprint material on a target region on a substrate using a mold to form a pattern on the target region, the apparatus comprising:
- a heater configured to deform the target region by heating the substrate;
- a measurement device configured to measure an overlay state between the target region and the mold;
- and
- a controller configured to control the heater such that the overlay state falls within a tolerance.
A method of manufacturing an article, the method comprising steps of:
- forming a pattern on a substrate using an imprint apparatus;
- processing the substrate, on which the pattern has been formed, to manufacture the article,
- wherein the imprint apparatus molds an imprint material on a target region on the substrate to form the pattern on the target region, and includes:
- a heater configured to deform the target region by heating the substrate;
- a measurement device configured to measure an overlay state between the target region and the mold;
- and
- a controller configured to control the heating device such that the overlay state falls within a tolerance.
Dependencies are inferred from the claim text.