Drawing apparatus, and method of manufacturing article
AssigneeCanon Kabushiki Kaisha
InventorsGo TSUCHIYA, Kazuya KIKUCHI
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AssigneeCanon Kabushiki Kaisha
InventorsGo TSUCHIYA, Kazuya KIKUCHI
Estimating the term…
The present invention provides a drawing apparatus which performs drawing on a substrate with a plurality of charged particle beams, the apparatus comprising two blanker arrays each including a plurality of first blankers which blank a plurality of charged particle beams individually and a plurality of second blankers which blank a plurality of charged particle beams in common, wherein the plurality of first blankers and the plurality of second blankers in each of the two blanker arrays are arranged such that one of the plurality of charged particle beams passes through corresponding one of the plurality of first blankers of one of the two blanker arrays and corresponding one of the plurality of second blankers of the other of the two blanker arrays.
A drawing apparatus which performs drawing on a substrate with a plurality of charged particle beams, the apparatus comprising:
A method of manufacturing an article, the method comprising steps of:
Dependencies are inferred from the claim text.