Physical quantity sensor, pressure sensor, altimeter, electronic apparatus, and moving object
AssigneeSeiko Epson Corporation
InventorsKazuya HAYASHI, Masahiro TAKEUCHI
Life of this patent
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AssigneeSeiko Epson Corporation
InventorsKazuya HAYASHI, Masahiro TAKEUCHI
Estimating the term…
A physical quantity sensor includes: a substrate that has a diaphragm section that is deformed to be deflected by receiving a pressure; a fixed electrode that is provided in the diaphragm section; and a movable electrode that has a movable section that is away from the fixed electrode and is disposed opposite to the fixed electrode, in which a shape of the diaphragm section in a plan view is a longitudinal shape extended in a predetermined direction, and in which a shape of the fixed electrode in a plan view is a longitudinal shape extending along a predetermined direction.
A physical quantity sensor comprising:
Dependencies are inferred from the claim text.