Device for aligning and pre-fixing a wafer

Device for aligning and prefixing a flat substrate on a carrier substrate for the further processing of the substrate, the device including:

• at least one aligning actuator having a single actuator arm, the single actuator arm oriented toward a center of the carrier substrate wherein the single actuator arm engages an outside contour of the flat substrate and/or an outside contour of the carrier substrate to move the flat substrate and/or the carrier substrate along a plane parallel to a contact surface of the flat substrate;
• and
• at least one attaching actuator engaging the flat substrate and/or the carrier substrate to at least partially prefix the flat substrate and the carrier substrate together.