Pneumatic end effector apparatus, substrate transportation systems, and methods for transporting substrates
AssigneeApplied Materials, Inc.
InventorsDaniel Greenberg, Ayan Majumdar
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Abstract
Systems, apparatus and methods including pneumatic end effectors for transporting substrates between system components of electronic device manufacturing systems are provided. In one aspect, an end effector has a base adapted to be connected to a robotic component, and one or more pneumatic suction elements positioned on the base. Applying a pneumatic source to the pneumatic suction element draws a substrate into contact with contact pads of the end effector. Methods and systems, as well as numerous other aspects are disclosed.
Claims20
An end effector apparatus, comprising:
- a base adapted to be connected to a robotic component;
- and
- a pneumatic suction element positioned on the base.
A substrate transportation system for transporting a substrate between electronic device manufacturing system components, comprising:
- a robotic component;
- and
- an end effector coupled to the robotic component, the end effector including
- a base adapted to be connected to a robotic component, and
- a pneumatic suction element positioned on the base.
A method of transporting a substrate between components of an electronic device manufacturing system, comprising:
- providing an end effector coupled to a robotic component, the end effector having one or more pneumatic suction element and three or more contact pads;
- supporting a substrate on the three or more contact pads;
- and
- generating a suction via operation of the one or more pneumatic suction elements to draw the substrate into increased contact with the at least three contact pads over that provided by a force of gravity.
Dependencies are inferred from the claim text.