Pellicle
AssigneeShin-Etsu Chemical Co., Ltd.
InventorJun Horikoshi
Life of this patent
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Abstract
There is provided a pellicle having a frame, a membrane and an agglutinant layer (adhesive to bond the pellicle on a photo mask) in which the release liner (detachable sheet) laid to the agglutinant layer for protection thereof is controlled to have a surface roughness of 5-30 micrometers on the side of the liner which is attached to the agglutinant layer, with a result that the releasability of the liner is improved suitably.
Claims2
A pellicle comprising a pellicle frame having a first frame face and a second frame face, a pellicle film bonded to said first frame face, an agglutinant layer laid over said second frame face for gluing the pellicle onto a glass substrate, and a release liner laid over said agglutinant layer to protect the agglutinant layer, said release liner comprising a base sheet and a parting agent laid over at least one face of the base sheet, wherein surface roughness of a release-side face of the release liner is 5-30 micrometers.
Dependencies are inferred from the claim text.