System for monitoring failure of substrate processing apparatus, and method for monitoring failure of substrate processing apparatus
AssigneeTokyo Electron Limited
InventorIchiro Namioka
Life of this patent
Estimating the term…
Abstract
Disclosed is a failure monitoring system for monitoring a failure of a substrate processing apparatus that performs a predetermined processing on a substrate to be processed, the failure monitoring system including: an alarm collecting unit configured to collects alarms issued from the substrate processing apparatus; and an analyzing unit configured to analyze the alarms collected by the alarm collecting unit and display, as an image, an alarm issuing frequency in each monitoring period on a two-dimensional space, of which one axis represents an alarm ID that specifies an alarm issuing area and another axis represents a predetermined monitor period.
Claims7
A failure monitoring system for monitoring a failure of a substrate processing apparatus that performs a predetermined processing on a substrate to be processed, the failure monitoring system comprising:
- an alarm collecting unit configured to collects alarms issued from the substrate processing apparatus;
- and
- an analyzing unit configured to analyze the alarms collected by the alarm collecting unit and display, as an image, an alarm issuing frequency in each monitoring period on a two-dimensional space, of which one axis represents an alarm ID that specifies an alarm issuing area and another axis represents a predetermined monitor period.
A failure monitoring method for monitoring a failure of a substrate processing apparatus that performs a predetermined processing on a substrate to be processed, the failure monitoring method comprising;
- collecting alarms issued from the substrate processing apparatus;
- and
- analyzing the alarms collected by the collecting of alarms, and displaying, as an image, an alarm issuing frequency in each monitor period on a two-dimensional space, of which one axis represents an alarm ID that specifies an alarm issuing area and another axis represents a predetermined monitor period.
Dependencies are inferred from the claim text.