Waveguide-coupled msm-type photodiode
AssigneeNEC Corporation
InventorsJunichi Fujikata, Takahiro Nakamura
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Abstract
A waveguide-coupled MSM-type photodiode of the present invention comprises a structure in which a semiconductor light-absorbing layer and an optical waveguide core layer are adjacent and optically coupled to each other, has formed metal-semiconductor-metal (MSM) junctions which are arranged at an interval on the semiconductor light-absorbing layer, and is characterized in that of the MSM electrodes arranged at the interval, a voltage is set so that a reverse bias is applied to those MSM electrodes that are arranged on a light incidence side.
Claims20
A waveguide-coupled metallic-semiconductor-metallic (MSM)-type photodiode comprising:
- a semiconductor light absorbing layer arranged to be adjacent to an optical waveguide core layer, the optical waveguide core layer being optically coupled with the semiconductor light absorbing layer;
- and
- MSM junctions configured to be formed on the semiconductor light absorbing layer, the MSM junctions being arranged at intervals;
- wherein a voltage is set such that a reverse bias is applied to an MSM electrode of a MSM junction arranged at a light incidence side among MSM electrodes of the MSM junctions arranged at intervals.
Dependencies are inferred from the claim text.