Method for determining beam parameters of a charge carrier beam, measuring device, and charge carrier beam divce

A method for determining beam parameters of a charge carrier beam (4), wherein

• a) the charge carrier beam (4) of a charge carrier beam apparatus (1) is guided by means of a beam deflection unit (3) over a slit diaphragm arrangement having at least one slit diaphragm (8), which is provided in a diaphragm apparatus (7),
• b) by means of a beam sensor (6) defining a measurement plane (10), measurement plane coordinates of beam impingement locations of beam portions that passed through said slit diaphragm arrangement are detected,
• c) a measurement diaphragm (9) arranged in said diaphragm apparatus (7) and constructed as a pinhole diaphragm is automatically moved into a position above a measurement reference point given in said measurement plane (10), wherein said measurement plane coordinates of said beam impingement locations are processed on the basis of the known geometrical arrangement of said at least one slit diaphragm (8) and said measurement diaphragm (9) on said diaphragm apparatus (7) for the purpose of determining control data for the movement of said measurement diaphragm (9), and
• d) said charge carrier beam (4) is guided, for the purpose of beam parameter measurement, over said measurement diaphragm (9) moved in accordance with feature c).