X-ray analyzer

An X-ray analyzer, comprising:

• a scanning unit for scanning a sample with a beam;
• an X-ray detector for detecting X-rays generated on the sample by the scanning;
• an element distribution obtaining unit for, from the detection result of the X-rays generated in an area on the sample scanned with the beam, obtaining intensity distribution of the X-rays whose energy or wavelength is included in a range of energy or wavelength set up in correspondence to an element contained in the sample and thereby obtaining distribution of the element;
• an intensity distribution acquiring unit for acquiring intensity distribution of X-rays whose energy or wavelength is not included in the range;
• a spectrum generating unit for generating a spectrum of X-rays generated in an area on the sample corresponding to a portion where the intensity of X-rays is not less than a predetermined intensity in the acquired intensity distribution;
• an element identification unit for identifying an element contained in the sample on the basis of a peak included in the generated spectrum;
• and
• a setting unit for setting a range of energy or wavelength of X-rays corresponding to the identified element,
• wherein the element distribution obtaining unit obtains distribution of the element identified by the element identification means, in accordance with the range set by the setting means.