Methods and apparatus for large diameter wafer handling
AssigneeEntegris, Inc.
InventorsBarry GREGERSON, Michael S. ADAMS, Jason T. STEFFENS
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AssigneeEntegris, Inc.
InventorsBarry GREGERSON, Michael S. ADAMS, Jason T. STEFFENS
Estimating the term…
A front semiconductor opening wafer container for large diameter wafers includes a container portion and a door. The container portion includes a left closed side, a right closed side, a closed back, an open front, and an open interior including a plurality of slots for receiving and containing the wafers. The door is attachable to the container portion to close the open front and selectively latchable to the container portion. The container portion includes a means for accommodating large diameter wafers, particularly 450 mm wafers. Optimized sag control is provided as well as enhanced structural rigidity, and wafer seating features.
(canceled)
A front opening wafer container for receiving a plurality of wafers positioned in a stacked array with a vertical axis, the container comprising:
A front opening wafer container for receiving a plurality of wafers positioned in a stacked array with a vertical axis, the container comprising:
A front opening wafer container for receiving a plurality of wafers positioned in a stacked array with a vertical axis, the container comprising:
Dependencies are inferred from the claim text.