Method of forming upper electrode of nanowire array and nanowire array with upper electrode formed
AssigneeKorea Research Institute of Standards and Science
InventorsWoo Lee, Hee Han
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AssigneeKorea Research Institute of Standards and Science
InventorsWoo Lee, Hee Han
Estimating the term…
Provided are a method of forming an upper electrode of a nanowire array and a nanowire array having an upper electrode formed thereon. The method includes a step of placing a polymeric thin film layer, a step of pressing, a step of treating a mixed solution, a step of etching, and a step of depositing an electrode material, such that the upper electrode is reliably formed in a state in which the polymeric thin film layer is formed on a portion of the nanowire, thereby making it possible to implement various nano-devices based on the nanowire array aligned on a substrate having a large area.
A method of forming an upper electrode of a nanowire array in which a plurality of nanowires are arranged on a substrate having a plate shape, the method comprising:
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