Platform unit for combined sensing of pressure, temperature and humidity
AssigneeTechnion Research & Development Foundation Limited
InventorsHossam Haick, Gregory Shuster, Meital Segev-Bar, Victoria Kloper, Sagi Gliksman
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Abstract
The present invention provides a modular platform unit comprising a plurality of sensors for the combined sensing of pressure, temperature and humidity. In particular, the sensors are composed of a layer of metallic-capped nanoparticles (MCNP) casted on a flexible substrate or a rigid substrate. Integration of the platform unit for artificial or electronic skin applications is disclosed.
Claims21
1-30. (canceled)
A platform unit for detecting a parameter selected from the group consisting of pressure, temperature, humidity and a combination thereof, the platform unit comprising:
- a plurality of sensors comprising metallic nanoparticles capped with an organic coating, wherein the plurality of sensors comprise:
- at least one pressure sensor being deposited on a substantially flexible substrate, wherein the pressure sensor is configured to sense pressure applied thereon and to generate an electrical signal in response thereto, and at least one temperature or humidity sensor configured to exhibit a change in conformation of the metallic nanoparticles capped with an organic coating in response to a change in temperature or a change in humidity and generate an electrical signal in response thereto, thereby providing the detection of pressure, temperature, humidity or their combination.
The platform unit according to claim 1 further comprising at least one of:
- i) a plurality of electrodes comprising an electrically conductive material, wherein the plurality of electrodes are coupled to each sensor and are used for measuring the signals generated by the sensors;
- or ii) a detection means comprising a device for measuring changes in resistance, conductance, alternating current (AC), frequency, capacitance, impedance, inductance, mobility, electrical potential, optical property or voltage threshold, or iii) a film, wherein the film is configured to block at least one sensor from generating a signal in response to a change in humidity, or iv) an analyte sensor, wherein the analyte sensor is configured to sense an analyte adsorbed thereon and to generate an electrical signal in response thereto.
The platform unit according to claim 1, wherein each sensor is configured in a form selected from the group consisting of a capacitive sensor, a resistive sensor, a chemiresistive sensor, an impedance sensor, and a field effect transistor sensor.
The platform unit according to claim 2, wherein the film is characterized by a thickness ranging from about 1 μm to about 1000 μm, and wherein the film is selected from the group consisting of an epoxy resin, a silicon resin, a polyamide resin, a polyimide resin, a poly(p-xylylene) resin and a combination thereof.
The platform unit according to claim 1, wherein the pressure sensor is configured to generate an electrical signal which is proportional to the amount of deflection of the substantially flexible substrate.
The platform unit according to claim 1, wherein the substantially flexible substrate is characterized by widths in the range of about 0.01-10 cm and thicknesses in the range of about 20-500 μm.
The platform unit according to claim 1, wherein the substantially flexible substrate comprises a polymer.
The platform unit according to claim 7, wherein the polymer is selected from the group consisting of polyimide, polyamide, polyimine, polyethylene, polyester, polydimethylsiloxane, polyvinyl chloride, and polystyrene.
The platform unit according to claim 1, wherein the temperature or humidity sensor is deposited on a substantially flexible or substantially rigid substrate.
The platform unit according to claim 9, wherein the substantially rigid substrate is selected from the group consisting of metals, insulators, semiconductors, semimetals, and combinations thereof.
The platform unit according to claim 1, wherein the metallic nanoparticles are selected from the group consisting of Au, Ag, Ni, Co, Pt, Pd, Cu, Al, and combinations thereof or wherein the metallic nanoparticles are metallic alloys selected from the group consisting of Au/Ag, Au/Cu, Au/Ag/Cu, Au/Pt, Au/Pd, Au/Ag/Cu/Pd, Pt/Rh, Ni/Co, and Pt/Ni/Fe.
The platform unit according to claim 1, wherein the organic coating comprises compounds selected from the group consisting of alkylthiols, arylthiols, alkylarylthiols, alkylthiolates, ω-functionalized alkanethiolates, arenethiolates, (γ-mercaptopropyl)tri-methyloxysilane, dialkyl disulfides and combinations and derivatives thereof.
The platform unit according to claim 1 comprising at least three sensors comprising metallic nanoparticles capped with an organic coating, wherein the three sensors comprise a pressure sensor being deposited on a substantially flexible substrate, wherein the pressure sensor is configured to sense pressure applied thereon and to generate an electrical signal in response thereto, a temperature sensor configured to exhibit a change in conformation of the metallic nanoparticles capped with an organic coating in response to a change in temperature and generate an electrical signal in response thereto, and a humidity sensor configured to exhibit a change in conformation of the metallic nanoparticles capped with an organic coating in response to a change in humidity and generate an electrical signal in response thereto.
The platform unit according to claim 13, wherein i) the temperature sensor is deposited on a substantially rigid substrate, or ii) wherein the humidity sensor is deposited on a substantially rigid substrate, or iii) wherein at least one sensor comprises dual sensing sensitivities.
The platform unit according to claim 14 comprising:
- i) a dual temperature and humidity sensor being deposited on a substantially flexible or rigid substrate;
- or ii) comprising a dual pressure and humidity sensor being deposited on a substantially flexible substrate;
- or iii) comprising a dual pressure and temperature sensor being deposited on a substantially flexible substrate;
- or iv) two sensors, wherein one sensor is a dual pressure and humidity sensor being deposited on a substantially flexible substrate, and the other sensor is a dual pressure and temperature sensor being deposited on a substantially flexible substrate.
The platform unit according to claim 15, wherein the signal generated by each parameter is extracted using pre-measurement calibration, post-measurement calculation or a combination thereof.
The platform unit according to claim 1, wherein the humidity sensor comprises continuous and discontinuous regions of metallic nanoparticles capped with an organic coating.
The platform unit according to claim 17, wherein the discontinuous regions comprise voids ranging in size from about 10 nm to about 500 nm.
The platform unit according to claim 18, wherein the discontinuous regions comprise between about 3% and about 90% voids.
The platform unit according to claim 1, integrated on electronic or artificial skin surface.
Dependencies are inferred from the claim text.