Coriolis flow sensor fabricated with laminated films processes

An integrated system for measuring flow of a medium, comprising:

• a control circuit;
• a coriolis flow sensor in signal communication with the control circuit, the coriolis flow sensor comprising:
• a first substrate layer comprising a first wall;
• a second substrate layer comprising a second wall;
• a third substrate layer disposed between the first and second substrate layers in a stacked configuration, the third substrate layer defining a flow path, wherein the first and second walls of the respective first and second substrate layers and the flow path defined by the third substrate layer define a first flow channel configured to receive a fluid therethrough, and wherein the first flow channel comprises a geometric loop configured to provide angular and linear freedom of motion in a plane of the first flow channel, wherein the angular and linear motion is caused by internal and external forces;
• an actuator configured to generate vibrations in the first flow channel;
• and
• a first sensor coupled to the first flow channel to detect vibrations of the first and second walls of the first flow channel, wherein the vibrations correspond to a coriolis force exerted on the first and second walls of the first flow channel when the fluid flows within the first flow channel.

An apparatus comprising:

• a first substrate layer comprising a first wall;
• a second substrate layer comprising a second wall;
• a third substrate layer disposed between the first and second substrate layers in a stacked configuration, the third substrate layer defining a flow path, wherein the first and second walls of the respective first and second substrates and the flow path defined by the third substrate layer define a first flow channel configured to receive a fluid therethrough, wherein the first substrate layer, the second substrate layer, and the third substrate layer comprise a flexible plastic film substrate, and wherein the first flow channel comprises a geometric loop configured to provide angular and linear freedom of motion in a plane of the first flow channel, wherein the angular and linear motion is caused by internal and external forces;
• an actuator configured to generate vibrations in the first flow channel;
• and
• a first sensor and a second sensor mounted symmetrically away from a centerline of the first flow channel to detect vibrations of the first and second walls of the first flow channel, wherein the vibrations correspond to a coriolis force exerted on the first and second walls of the first flow channel when the fluid flows within the first flow channel.