Sensor device with integrated calibration system and calibration method

A method, comprising:

• calibrating an integrated sensor device that includes a first die coupled to a second die, the first die includes a sensor element configured to detect a quantity external to the sensor device and transduce said external quantity into an electrical sensing signal, the integrated sensor device includes a resistive heater, of the calibrating including:
• generating a flow of electric current between first and second conduction terminals of the heater with a signal generator for generating heat by the Joule effect;
• measuring a temperature value;
• interrupting the generating of said flow of electric current if the temperature value measured is equal to, or greater than, a predefined value;
• and
• calibrating the sensor element after the interrupting.

A device, comprising:

• a resistive heater element;
• a first die that includes:
• a sensor element;
• and
• a second die stacked on the first die, the second die includes:
• a signal generator coupled to the resistive heater element, the signal generator being configured to heat the resistive heater element to a selected temperature for calibration of the device;
• and
• biasing and reading circuitry coupled to the sensor element.