Deposition apparatus, method of forming thin film using the deposition apparatus, and method of manufacturing organic light emitting display apparatus using the deposition apparatus

A method of manufacturing an organic light emitting display apparatus using a deposition apparatus, the method comprising:

• providing a layer on a substrate of the organic light emitting display apparatus,
• wherein the providing the layer comprises:
• receiving a raw material gas, converting the raw material gas to a deposition source material in a radical form, and supplying the deposition source material to the substrate using a plasma generating member of an injection unit of the deposition apparatus;
• and
• performing a plasma process in a direction facing the substrate using a plasma processor of the deposition apparatus, wherein the plasma processor is disposed adjacent to the injection unit and facing a side of the injection unit.