Sputtering target, method of fabricating the same, and method of fabricating an organic light emitting display apparatus
AssigneeSamsung Display Co., Ltd.
InventorsSang-Wook Sin, Sun-Young Jung, Il-Sang Lee, Jin-Woo Park, Dong-Jin Kim
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Abstract
A method of fabricating a sputtering target is provided. The method includes preparing a first powder material, wherein the first powder material includes tin oxide; preparing a mixture by mixing the first powder material and a second powder material, wherein the second powder material includes carbon; and fabricating the sputtering target by compressing and sintering the mixture simultaneously in a reducing atmosphere.
Claims19
A method of fabricating a sputtering target, the method comprising:
- preparing a first powder material, wherein the first powder material includes tin oxide;
- preparing a mixture by mixing the first powder material and a second powder material, wherein the second powder material includes carbon;
- and
- fabricating the sputtering target by compressing and sintering the mixture simultaneously in a reducing atmosphere.
A sputtering target comprising:
- a mixture of a first powder material and a second powder material, wherein the first powder material includes tin oxide and the second powder material includes carbon.
A method of manufacturing an organic light-emitting display apparatus, the method comprising:
- forming an organic light-emitting unit on a substrate, wherein the organic light-emitting unit includes a lower electrode, an organic light-emitting layer, and an upper electrode;
- and
- forming a thin film encapsulation layer for encapsulating the organic light-emitting unit,
- wherein the thin film encapsulation layer is formed using a sputtering target and a sputtering method,
- wherein the sputtering target comprises a first powder material including tin oxide and a second powder material including carbon, and
- wherein the thin film encapsulation layer includes the first powder material, and the carbon is omitted from the thin film encapsulation layer.
Dependencies are inferred from the claim text.