Trichlorosilane production
AssigneeCentrotherm Photovoltaics USA, Inc.
InventorMark William Dassel
Life of this patent
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Abstract
A process that includes combining hydrogen chloride, metallurgical grade silicon and a third gas, e.g., tetrachlorosilane, in a reactor, under reaction conditions that include a temperature of 250-400 C. and a pressure of 2-33 barg, for a time sufficient to convert metallurgical grade silicon to an exit gas that includes trichlorosilane.
Claims18
A process comprising combining hydrogen chloride, metallurgical grade silicon and a third material (M3) selected from silicon tetrachloride, trichlorosilane, dichlorosilane, and hydrogen, in a reactor, under reaction conditions comprising a temperature of 250-400° C. and a pressure of 2-33 barg, for a time sufficient to convert metallurgical grade silicon to an exit gas comprising trichlorosilane.
A process comprising
- a) introducing silicon tetrachloride and hydrogen to an STC converter and recovering an off-gas comprising hydrogen chloride and M3;
- and
- b) introducing the off-gas and metallurgical grade silicon to a chlorination reactor under reactor operating conditions comprising a temperature of 250-350° C. and a pressure of 2-33 barg, for a time sufficient to convert metallurgical grade silicon to an exit gas comprising trichlorosilane.
Dependencies are inferred from the claim text.