Processing station for two-dimensional substrates and method for processing two-dimensional substrates

A method for processing two-dimensional substrates using a processing station including at least two processing units and at least two conveyor lines for substrates arranged in parallel to another, wherein both the processing units are placed between the two conveyor lines, and means for moving the substrates from the conveyor lines to the processing units and back, wherein the means for moving the substrates include four linear conveyor units each having at least one substrate support, wherein a first linear conveyor unit is disposed between a transfer point in the second conveyor line and the first processing unit, a second linear conveyor unit is disposed between a transfer point in the first conveyor line and the first processing unit, a third linear conveyor unit is disposed between a transfer point in the first conveyor line and the second processing unit, and a fourth linear conveyor unit is disposed between a transfer point in the second conveyor line and the second processing unit;

• the method including moving unprocessed substrates by means of one of the linear conveyor units from one of the transfer points of the conveyor lines to a processing unit and return of the processed substrate from the processing unit to the same transfer point of the conveyor lines by means of the same linear conveyor unit.