Stage apparatus, lithography apparatus and method of manufacturing article
AssigneeCanon Kabushiki Kaisha
InventorsHiroshi KII, Nobushige KORENAGA
Life of this patent
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Abstract
The present invention provides a stage apparatus which holds a substrate, including a first moving stage, a second moving stage supported by the first moving stage, a linear motor including a coil arranged on the first moving stage, and a magnet arranged on the second moving stage in correspondence with the coil, a first channel formed in the first moving stage to supply a first refrigerant for recovering heat from the coil not to contact the coil, a cover member arranged on the first moving stage to surround the coil and be spaced apart from the coil, and a second channel formed in the cover member to supply a second refrigerant for recovering heat from the cover member not to contact the coil.
Claims10
A stage apparatus which holds a substrate, comprising:
- a first moving stage;
- a second moving stage supported by the first moving stage;
- a linear motor including a coil arranged on the first moving stage, and a magnet arranged on the second moving stage in correspondence with the coil;
- a first channel formed in the first moving stage to supply a first refrigerant for recovering heat from the coil not to contact the coil;
- a cover member arranged on the first moving stage to surround the coil and be spaced apart from the coil;
- and
- a second channel formed in the cover member to supply a second refrigerant for recovering heat from the cover member not to contact the coil.
A method of manufacturing an article, the method comprising:
- transferring a pattern on a substrate using a lithography apparatus;
- and
- processing the substrate on which the pattern has been transferred,
- wherein the lithography apparatus includes:
- a stage apparatus configured to hold the substrate;
- and
- a processing unit configured to perform a transfer process of transferring the pattern on the substrate held by the stage apparatus, and
- wherein the stage apparatus includes:
- a first moving stage;
- a second moving stage supported by the first moving stage;
- a linear motor including a coil arranged on the first moving stage, and a magnet arranged on the second moving stage in correspondence with the coil;
- a first channel formed in the first moving stage to supply a first refrigerant for recovering heat from the coil not to contact the coil;
- a cover member arranged on the first moving stage to surround the coil and be spaced apart from the coil;
- and
- a second channel formed in the cover member to supply a second refrigerant for recovering heat from the cover member not to contact the coil.
Dependencies are inferred from the claim text.