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US 2015/0028444 A1Published application
Infrared detection element
AssigneePanasonic Corporation
InventorsToshinari NODA, Takashi KUBO, Hisao SUZUKI, Naoki WAKIYA, Naonori SAKAMOTO
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Abstract
An infrared detection element includes a substrate, a lower electrode layer, a pyroelectric layer, and an upper electrode layer. The lower electrode layer is fixed to the substrate, and the pyroelectric layer is formed on the lower electrode layer. The upper electrode layer is formed on pyroelectric layer. The lower electrode layer contains pores therein and has a larger thermal expansion coefficient than the pyroelectric layer.
Claims11
An infrared detection element comprising:
- a substrate;
- a lower electrode layer fixed to the substrate;
- a pyroelectric layer formed on the lower electrode layer;
- and
- an upper electrode layer formed on the pyroelectric layer,
- wherein the lower electrode layer contains pores therein and has a larger thermal expansion coefficient than the pyroelectric layer.
3 more elements
Dependencies are inferred from the claim text.