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AssigneeYokogawa Electric Corporation
InventorsTakashi YOSHIDA, Shuuji OKUDA, Shigeto IWAI
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A resonant transducer includes a silicon single crystal substrate, a silicon single crystal resonator disposed over the silicon single crystal substrate, a shell made of silicon, surrounding the resonator with a gap, and forming a chamber together with the silicon single crystal substrate, an exciting module configured to excite the resonator, a vibration detecting module configured to detect vibration of the resonator, a first layer disposed over the chamber, the first layer having a through-hole, a second layer disposed over the first layer, a third layer covering the first layer and the second layer, and a projection extending from the second layer toward the resonator, the projection being spatially separated from the resonator, the projection being separated from the first layer by a first gap, the second layer being separated from the first layer by a second gap, the first gap is communicated with the second gap.
A resonant transducer comprising:
A manufacturing method of a resonant transducer, the method comprising:
A multi-layer structure for a resonant transducer, the multi-layer structure comprising:
Dependencies are inferred from the claim text.